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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
INTERNATIONAL BUSINESS MACHINES CORPORATION	ARMONK NY

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Jagannathan, Rangarajan	South Burlington, VT	29	552
Madden, Karen P	Poughquag, NY	12	161
McCullough, Kenneth J	Fishkill, NY	25	329
Okorn-Schmidt, Harald F	Putnam Valley, NY	17	340
Pope, Keith R	Danbury, CT	30	407
Rath, David L	Stormville, NY	81	993

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 6066267

Etching of silicon nitride

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