Hard carbon thin film and method of forming the same

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United States of America Patent

PATENT NO 6066399
SERIAL NO

09045163

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Abstract

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A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp.sup.2 to sp.sup.3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film.

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Patent Owner(s)

Patent OwnerAddress
DIAMOND COATING TECHNOLOGIES LLC200 WEST EVELYN AVENUE SUITE 100 MOUNTAIN VIEW CA 94041-1365

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Domoto, Yoichi Ikoma, JP 31 1141
Hirano, Hitoshi Nishinomiya, JP 264 2221
Kuramoto, Keiichi Kadoma, JP 52 1074

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