Microbellows actuator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
May 30, 2000
Grant Date -
N/A
app pub date -
Apr 8, 1998
filing date -
Apr 11, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.
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Cited Art Landscape
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