Apparatus for melt-level detection in Czochralski crystal growth systems
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United States of America Patent
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Jun 6, 2000
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N/A
app pub date -
Feb 27, 1997
filing date -
Feb 28, 1996
priority date (Note) -
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Abstract
A method of and system for determining the melt-level in a crystal growing system. A rangefinder emits a signal to reflect off the melt. The reflected signal is directed to a retroreflector. The retroreflector redirects the signal along a parallel path back to the melt surface. The redirected signal is reflected off the melt surface back to the rangefinder, where it is analyzed to determine the distance traveled by the signal. From this, changes in melt-level are determined and the melt-level may be appropriately controlled.
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