Thermophoretic vacuum wand
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United States of America Patent
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Jun 6, 2000
Grant Date -
N/A
app pub date -
Dec 11, 1998
filing date -
Dec 11, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.
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