Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
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United States of America Patent
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Jun 6, 2000
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N/A
app pub date -
Jun 3, 1996
filing date -
Jun 3, 1996
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Abstract
A rapid thermal heating system which includes a plurality of radiant energy sources to irradiate a predetermined area of a substrate. The radiant energy sources are associated with reflectors wherein portions of radiated areas of adjacent radiant energy sources overlap. The reflectors include a flared specular surface at their light emitting end or outlet. The flared specular surface reflects radiant energy toward the substrate.
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