Thin film metal/metal oxide thermocouple
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United States of America Patent
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Jun 6, 2000
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N/A
app pub date -
Jul 1, 1999
filing date -
Jul 1, 1999
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Abstract
A thin film thermocouple having junctions (2, 7) of metal and semiconducting metal oxides such as tin oxide/silver, and used as surface temperature sensors in conjunction with thin film heating elements (1) to control temperature.
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