Apparatus and method for reducing stray laser light in particle sensors using a narrow band filter
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United States of America Patent
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Jun 6, 2000
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N/A
app pub date -
Jul 6, 1994
filing date -
Jul 6, 1994
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Abstract
A dark-field particle monitor and a method for reducing errors due to stray light in the particle monitor provides a particle monitor having (i) an optical element focussed on the laser beam for detecting particles and (ii) a filter for preferentially selecting light incident on said filter in a preferential direction. In one embodiments the filter is implemented by a narrow band filter having maximum transmission for light having a wavelength of the laser beam.
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