Process for fabricating layered superlattice materials and making electronic devices including same
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United States of America Patent
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Jun 6, 2000
Issued Date -
N/A
app pub date -
Mar 17, 1995
filing date -
Feb 25, 1991
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Abstract
A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Special polyoxyalkylated precursor solutions are designed to optimize polarizability of the corresponding metal oxide materials by adding dopants including stoichiometric excess amounts of bismuth and tantalum. The RTP baking process is especially beneficial in optimizing the polarizability of the resultant metal oxide.
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