Cleaning composition for mold for molding semiconductor device and method of cleaning mold using the same
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United States of America Patent
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Jun 20, 2000
Issued Date -
N/A
app pub date -
Mar 26, 1999
filing date -
Dec 10, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cleaning composition for a mold for molding a semiconductor device comprising an unvulcanized rubber, a cleaning agent, and water in an amount of from 1 to 30% by weight based on the total amount of the cleaning composition. The cleaning composition is preferably used as a sheet form comprising the cleaning composition itself, wherein a plurality of straight cuts are formed on the surface of the sheet in a definite direction in parallel at an definite interval for enabling folding of the sheet and at least one cutting cut may be formed on the surface such that the cutting cut crosses perpendicularly to the plural cuts. The cleaning sheet is very effective to remove soiled material on the inside surfaces of a mold formed by repeatedly molding semiconductor devices using a thermosetting resin composition.
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