Method of coating edges with diamond-like carbon
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United States of America Patent
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Jun 20, 2000
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app pub date -
Jun 18, 1997
filing date -
Jun 18, 1997
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Abstract
A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5.times.10.sup.10 per cm.sup.3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment.
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