Method and system for segmented scatter measurement
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United States of America Patent
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Jun 20, 2000
Grant Date -
N/A
app pub date -
Nov 17, 1998
filing date -
Nov 17, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.
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