Dual plate gas assisted heater module
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United States of America Patent
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Jun 27, 2000
Grant Date -
N/A
app pub date -
May 26, 1998
filing date -
Aug 8, 1997
priority date (Note) -
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Abstract
A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to introducing it into a subchamber for active heating.
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International Classification(s)
Cited Art Landscape
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