Semiconductor device having alignment mark
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 27, 2000
Grant Date -
N/A
app pub date -
Mar 16, 1998
filing date -
Mar 17, 1997
priority date (Note) -
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Abstract
An alignment mark for determining a position of a thin film resistor formed on a semiconductor chip. The alignment mark is disposed on a capacitor formation region of the semiconductor chip. Because aluminum wiring members of the semiconductor chip are not disposed adjacent to the alignment mark within the capacitor formation region, the alignment mark can be precisely recognized. As a result, the position of the thin film resistor can be also precisely determined.
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