Substrate carrier for a vacuum coating apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jul 4, 2000
Grant Date -
N/A
app pub date -
May 12, 1997
filing date -
May 10, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A vacuum coating apparatus includes a carrier accommodating substrates to be coated; and an evaporation source vertically spaced from the carrier and emitting a vapor stream onto the substrates mounted on the carrier. The carrier includes at least two radially adjoining segments each accommodating at least one substrate to be coated and a hinge interconnecting adjoining segments for allowing a tilting motion of the segments to either side relative to one another up to a predetermined angle.
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Cited Art Landscape
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