Prealigner and planarity teaching station
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United States of America Patent
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-
Jul 4, 2000
Issued Date -
N/A
app pub date -
May 11, 1998
filing date -
May 11, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station. The adjustment of the substrate or end effector plane allows substrates to be removed from and delivered to various cassettes and workstations of a substrate processing system without damage to the substrate caused by end effector misalignment.
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