Tiltable Z-axis platform based on uni-directional tilt platform
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United States of America Patent
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Jul 11, 2000
Issued Date -
N/A
app pub date -
May 5, 1998
filing date -
May 5, 1998
priority date (Note) -
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Abstract
A uni-directional tilt mechanism for supporting a robotic arm mechanism or other structures includes a simplified system of two motors for tilting a support platform in one dimension. The uni-directional tilt platforms according to the invention may be stacked to provide a universally tiltable stacked platform system for supporting a robotic arm mechanism. The multi-directional tilt stacked platform system can be used to align a Z-axis of a transferred substrate with cassettes or workstations in which substrate is to be placed by the robot.
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