Importance

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Abstract

A low energy consumption valve module (16) includes low energy consumption valves (20) having either bimorphs or monomorphs defined by a circular diaphragm (21) carrying one or more piezoelectric discs (22) (23) operative to position a sealing disc (36) for sealing a valve seat (34). In one embodiment the discs are energized across conductive seals (51,52,54,56) and in another embodiment the discs are energized by a pair of flexible conductors (150). A process for making the bimorphs or monomorphs comprises a tape cast process in which ceramic with piezoelectric properties is shaped without machining. A process for making the valve module providing a valve body (200) and valve cover (202) of either laser energy transparent or laser energy absorbent polyimide material that are joined at a line to line contact (210) and sealed upon application of a laser welding beam to the line to line contact between the valve body and the valve cover at the perimeter thereof.

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First Claim