Heat processing device with hot plate and associated reflector
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jul 11, 2000
Grant Date -
N/A
app pub date -
Jan 11, 1999
filing date -
Jan 11, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A heat processing device includes a hot plate on which a substrate is placed, a heater press-fitted in the hot plate for heating the substrate through the hot plate, and a reflecting plate facing an underside and side faces of the hot plate at a distance therefrom for reflecting heat radiated from the hot plate. An outside frame is arranged on the surface of the hot plate so as to surround the substrate.
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