Corrugated MEMS heater structure
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United States of America Patent
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Jul 11, 2000
Grant Date -
N/A
app pub date -
Jul 10, 1998
filing date -
Jul 15, 1997
priority date (Note) -
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Abstract
A thermal actuator comprising a first conductive material encased in a second non-conductive expansive material wherein said first conductive material is constructed in the form of a corrugated heater element so as to increase the rate of thermal transfer to said second non-conductive expansive material.
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