Accelerometer and method for making same

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United States of America Patent

PATENT NO 6089093
SERIAL NO

09077888

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Abstract

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An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

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Patent Owner(s)

  • SEXTANT AVIONIQUE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Giroud, Pierre Bourg les Valence, FR 6 37
Lefort, Olivier Valence, FR 8 125
Pedraza-Ramos, Sylvie Valence, FR 3 20
Presset, Rene Etoile sur Rhone, FR 2 63

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