Semiconductor wafer carrier
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 18, 2000
Grant Date -
N/A
app pub date -
Aug 13, 1997
filing date -
Aug 26, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention provides a boat-type semiconductor wafer carrier which prevents such a situation that, upon wet processing of semiconductor wafers, the wafers carried thereon are displaced from grooves thereof and inclined until they fall down or contact with each other to break themselves or damage the surfaces of them. A holding member for holding down upper portions of the wafers is mounted on the boat-type carrier, and the wafer holding member is removable from the boat-type carrier, and is mounted onto the boat-type carrier to fix the wafers aligned on the boat-type carrier. Transportation of the wafers between processing tanks is performed by transporting the boat-type carrier on which the wafers are carried.
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