Method for forming a semiconductor device structure having a laser portion

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United States of America Patent

PATENT NO 6090635
SERIAL NO

09329133

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A heterostructure device includes a ridge-waveguide laser monolithically integrated with a ridge-waveguide rear facet monitor (RFM). An integral V-groove etched directly into the device substrate enables passive alignment of an optical fiber to the active region of the laser. The layer and RFM facets were formed using an in-situ multistep reactive ion etch process.

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  • GTE LABORATORIES INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Armiento, Craig Alfred Acton, MA 2 5
Negri, Alfred Joseph Waltham, MA 1 5
Rothman, Mark Alan Acton, MA 1 5
Shieh, Chan-Long Paradise Valley, AZ 136 3637
Thompson, John Alvin Bedford, MA 1 5

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