Semiconductor processing apparatus having lift and tilt mechanism
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 18, 2000
Issued Date -
N/A
app pub date -
Dec 15, 1997
filing date -
Jul 15, 1996
priority date (Note) -
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Abstract
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide/actuator comprising a fixed frame and a movable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the movable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
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