Method and system for anomaly detection

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United States of America Patent

PATENT NO 6091846
SERIAL NO

08867156

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hennessey, A Kathleen Lubbock, TX 12 1072
Khaja, Veera S Dallas, TX 2 296
Lin, YouLing Plano, TX 19 1061
Pattikonda, Ramakrishna Dallas, TX 6 565
Reddy, Rajasekar Dallas, TX 6 745

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