Importance

Loading Importance Indicators...

Abstract

A rate sensor has a tine cut from a silicon substrate and resiliently mounted by two integral flexure beams. An electrostatic actuator drives the tine to vibrate in its plane. The tine supports two tunnel pick-offs in the form of spikes projecting from the tine, the tips of the spikes being positioned below a pick-off plate. In operation, the plate is moved down until it is closely spaced from the spikes and a tunneling current is produced. One spike is positioned below a recess so that there is a sharp fall in current when the spike passes beneath the recess, this signal being used to indicate the amplitude and frequency of vibration. The tunneling current output from the other spike indicates the separation from the plate. Rotation of the sensor about an axis y in the plane of vibration of the tine causes displacement of the tine at right angles, which is sensed by the tunnel pick-off.

Loading the Abstract Image...

First Claim