Non-contact tunnelling field measurement for a semiconductor oxide layer

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United States of America Patent

PATENT NO 6097196
SERIAL NO

08841501

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Abstract

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A corona source is used to repetitively apply charge to an oxide layer on a semiconductor. A Kelvin probe is used to measure the resulting voltage across the layer. The tunneling field is determined based on the value of voltage at which the voltage measurement saturates.

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Patent Owner(s)

Patent OwnerAddress
KEITHLEY INSTRUMENTS INC28775 AURORA ROAD CLEVELAND OH 44139

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horner, Gregory S 3717 Carlysle Ave., Santa Clara, CA 95051 24 683
Miller, Tom G 7077 Fox Hill Dr., Solon, OH 44139 7 282
Verkuil, Roger L 37 Sherwood Hts., Wappinger Falls, NY 12590 24 1362

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