Non-contact holder for wafer-like articles
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 8, 2000
Grant Date -
N/A
app pub date -
Nov 25, 1998
filing date -
May 31, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A holder for wafer-like articles is formed by providing a platform having a wafer-like article facing surface that includes at least one annular groove therein. The annular groove has a ceiling surface therein which is provided with an opening. A gas conducting conduit is connected to the opening. A gas, which introduced into the conduit, exits the conduit through the opening. By choosing a particular orientation of the conduit relative to the annular groove, the gas exiting the opening can be caused to circulate in a clockwise or counter clockwise fashion. The circular flow of gas causes the formation of a vortex adjacent to the article facing surface. A wafer-like article may be held in a suspended state adjacent to the wafer-like article facing surface without contact by the vortex and the gas flowing between the wafer-like article and the article facing surface.
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