Recessed etch RF micro-electro-mechanical switch
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United States of America Patent
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Aug 8, 2000
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N/A
app pub date -
Jul 17, 1998
filing date -
Jul 17, 1998
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Abstract
A novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.
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