Semiconductor pressure sensor including a resistive element which compensates for the effects of temperature on a reference voltage and a pressure sensor
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United States of America Patent
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Aug 15, 2000
Grant Date -
N/A
app pub date -
Sep 11, 1997
filing date -
Apr 8, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor pressure sensor includes a substrate with a semiconductor pressure detecting element mounted thereon. The pressure detecting element includes a pressure detector, having two terminals, which generates a small potential difference between the two terminals in proportion to a pressure applied to the pressure sensor, and a peripheral circuit for differential amplification of the small potential difference based on a reference voltage applied thereto. Reference voltage setting resistors are used to set the reference voltage to a predetermined value. Also, temperature compensating resistors compensate for an error produced in the pressure detector as a result of change in temperature and an error caused in the peripheral by a change of the reference voltage resulting from the change in temperature, respectively.
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