Three-dimensional shape measuring apparatus
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United States of America Patent
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Aug 22, 2000
Issued Date -
N/A
app pub date -
Mar 8, 1999
filing date -
Sep 29, 1995
priority date (Note) -
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Abstract
A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus.
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