Device for re-directing light from optical waveguide
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United States of America Patent
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Aug 22, 2000
Issued Date -
N/A
app pub date -
Feb 6, 1998
filing date -
Feb 7, 1997
priority date (Note) -
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Abstract
The device is formed on a silicon-on-insulator chip (which comprises a layer of silicon (1) separated from a substrate (3) by an insulator layer (2)) and comprises an integrated waveguide (4) formed in the silicon layer (1) and a reflective facet (6) formed in a recess in the silicon layer (1). The facet (6) is positioned to redirect light in a desired direction. The waveguide (4) and facet (6) are both formed in the silicon layer (1) so their positions can be defined by the same lithographic steps so they are automatically aligned with each other.
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