Apparatus for handling and transporting plate like substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Aug 29, 2000
Grant Date -
N/A
app pub date -
May 28, 1998
filing date -
May 28, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for handling and transporting plate like substrates comprises a first flat carrier member and a second flat carrier member, the second flat carrier member being arranged at least along one side wall of the first carrier member, the first and second carrier members being arranged horizontally and provided with at least four vertically extending guiding members, arranged at spaced locations to each other in two sets of at least two guiding members each, whereby each carrier member comprises at least one guiding member of each set of guiding members, the first and second carrier member being mounted on a robot and moveable relative to each other in a longitudinal direction.
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