Multilayer absorbing antireflective coating

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United States of America Patent

PATENT NO 6111698
SERIAL NO

09262602

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Abstract

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A reflection control member includes a multilayer stack that is adhered to a substrate using a primer layer to promote adhesion. The multilayer stack includes pairs of layers in which the first layer is a grey metal and the second layer is a substantially transparent material. In the preferred embodiment, the grey metal is nickel chromium and the transparent layer is a silicon oxide. For each pair of layers, the grey metal is nearer to the surface of the substrate for which antireflection is a concern. The primer layer has a thickness of less than 50 angstroms. Although the primer layer is deposited in an essentially oxygen-free environment, it may oxidize following deposition.

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Patent Owner(s)

Patent OwnerAddress
SOUTHWALL TECHNOLOGIES INC3788 FABIAN WAY PALO ALTO CA 94303

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bright, Clark I Tucson, AZ 31 1131
Woodard, Floyd Eugene Belmont, CA 4 85

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