Probe card with plural probe tips on a unitary flexible tongue
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 5, 2000
Grant Date -
N/A
app pub date -
Apr 14, 1997
filing date -
Apr 15, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe card comprises the following elements. An insulation film is provided which is flexible and extends on a first surface of a substrate. The insulation film has a first surface in contact with the first surface of the substrate, to form a space region which is defined between the first surface of the substrate and the first surface of the insulation film so as to allow part of the insulation film to move into the space. Probe patterns extend on a second surface of the insulation film so that the probe patterns.
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