Steam supplying apparatus and method for controlling same
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United States of America Patent
Stats
-
Sep 5, 2000
Issued Date -
N/A
app pub date -
Jun 5, 1995
filing date -
Oct 5, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A steam supplying apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an on going ashing process. The closed vessel has a maximum horizontal cross sectional water evaporation area M and a minimum horizontal cross sectional water evaporation area S. The vessel is configured so that M/S<8, and the closed vessel has a submerged inside surface which is coated with a resin. The closed water-containing vessel is provided with a steam outlet connected thereto at a location above the surface of the water therein. The apparatus further includes a temperature-controlled liquid bath for the closed water-containing vessel and the vessel is at least partially submerged in the liquid bath.
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