Process for producing a silicon single crystal, and heater for carrying out the process

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United States of America Patent

PATENT NO 6117230
SERIAL NO

08977584

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Abstract

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A process for producing a silicon single crystal by the Czochralski method, utilizes a heater which is intended for heating a silicon-filled crucible and is arranged below the crucible. The process has energy delivered to the melt at least some of the time inductively using a coiled heater arranged under the crucible. The heater is in the form of a wound coil.

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Patent Owner(s)

Patent OwnerAddress
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AGJOHANNES-HESS-STRASSE 24 BURGHAUSEN 84489

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ammon, Wilfried Von Burghausen, DE 17 204
Fuchs, Paul Schalchen, AT 11 61
Gelfgat, Yuri Riga, LV 5 22
Tomzig, Erich Burgkirchen, DE 10 37

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