Method of producing a calibration disk
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United States of America Patent
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-
Sep 12, 2000
Grant Date -
N/A
app pub date -
Dec 4, 1998
filing date -
Apr 28, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of making a calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results. The ring of overlapping bumps is preferably formed by rotating a disk substrate under a stationary pulsing laser beam.
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