Removal of silicon oxide

United States of America Patent

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Sep 12, 2000
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N/A
app pub date
Aug 13, 1998
filing date
Aug 13, 1998

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Expired

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Abstract

Silicon oxide is removed from an article employing a liquid composition containing a fluoride-containing compound, organic solvent, and water. The methods of the invention are especially useful for removal of silicon oxide formed by thermal oxidation of a silicon substrate.

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Patent Owner(s)

Patent Owner	Address
INTERNATIONAL BUSINESS MACHINES CORPORATION	NEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Gale, Glenn W	Austin, TX	10	115
Jagannathan, Rangarajan	Essex Junction, VT	29	552
Madden, Karen P	Poughquag, NY	12	161
McCullough, Kenneth J	Fishkill, NY	25	329
Okorn-Schmidt, Harald F	Putnam Valley, NY	17	340
Pope, Keith R	Danbury, CT	30	407
Rath, David L	Stormville, NY	81	993

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Removal of silicon oxide

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09133424

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PATENT NO	6117796
SERIAL NO	09133424
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09133424

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