Apparatus and method for observing defect having marks making means
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United States of America Patent
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-
Sep 12, 2000
Grant Date -
N/A
app pub date -
Aug 24, 1998
filing date -
Aug 25, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A detect observing apparatus according to the present invention has a purpose for forming an observing specimen by using a TEM and the like in a positive and simple manner and is used in observation of defect or foreign matter in an object to be tested by means of a laser tomography and includes an illumination means for illuminating observing laser light onto the object to be tested, and a microscope for observing the illuminated object to be tested, the apparatus further comprises a marking means for forming marks at a plurality of points on a surface of the object to be tested in the vicinity of the defect or foreign matter to be observed under the microscope, and a position detecting means for detecting positions of the plurality of marks formed on the surface of the object to be tested and a position of the observed defect or foreign matter through the microscope.
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