Prober and method for cleaning probes provided therein
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United States of America Patent
Stats
-
Sep 12, 2000
Grant Date -
N/A
app pub date -
Apr 28, 1998
filing date -
Jun 7, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A prober including a probe card, a main chuck, a spacer, a conveying mechanism, and a supporting portion. The probe card is provided on an upper surface of a main body of the prober. The main chuck is provided in the main body of the prober, underneath the probe card, to be movable in X, Y, Z and .theta. directions. The spacer has an upper portion on which a cleaner tool for the probe card is held. The conveying mechanism for conveying the spacer between outside of the main body of the prober and a position on the main chuck. The supporting portion is provided on an outer side surface of the main chuck, for supporting the spacer. The main chuck is moved up and down directly underneath the probe card such that probes of the probe card is cleaned with the cleaner tool on the spacer held on the main chuck.
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