Feeding apparatus and replenishing method of processing solution
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United States of America Patent
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Sep 19, 2000
Grant Date -
N/A
app pub date -
Sep 28, 1999
filing date -
Sep 28, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
In the case of a feeding apparatus which automatically performs drainage of a processing solution from a first tank and replenishment of the first tank with a processing solution by the use of a timer, when a pipe for sending NH4OH from the first tank to a scrubbing unit (SCR) is clogged, no liquid level is detected by a lowermost limit sensor before a set time of a replenishment timer expires, whereby replenishment of NH4OH is not started. Consequently, there never arises such a situation that remaining NH4OH and new NH4OH are mixed in the first tank.
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