Dual resolution combined laser spot scanning and area imaging inspection
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United States of America Patent
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Sep 19, 2000
Grant Date -
N/A
app pub date -
Oct 2, 1998
filing date -
Oct 2, 1998
priority date (Note) -
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Abstract
An optical inspection system for inspecting a substrate includes a light detector, a light source, a deflection system, an objective lens and an optical system. The light source produces an illuminating beam directed along a path to the substrate. The deflection system scans the illuminating beam on a scan line of the substrate. The objective lens focuses the illuminating beam on the substrate and coliects light reflected therefrom. The collected beam is angularly wider than the illuminating beam. The optical system directs the collected light beam along a path at least partially different than the path of the illuminating beam and focuses the collected beam on the light detector. In one embodiment, the system additionally includes at least one dark field detector for collecting light deflected from the substrate.
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