Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
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United States of America Patent
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Sep 26, 2000
Grant Date -
N/A
app pub date -
Jan 19, 1999
filing date -
Jan 19, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides a regeneration shield 22 for a vacuum system, typically used in the processing of integrated circuits. The regeneration shield protects fragile arrays 13, having a dislocatable material 16, such as charcoal, in a high vacuum pump 4 from volatile regeneration gases, which impinge the fragile material on the array and dislocate that material to cause pumping inefficiencies and scrap. The shield may be planar, concave, or convex and may have sides. The shield may also have inwardly and outwardly extending flanges.
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