Electrostatic capacity-type pressure sensor with reduced variation in reference capacitance
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United States of America Patent
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Sep 26, 2000
Grant Date -
N/A
app pub date -
May 15, 1998
filing date -
Sep 19, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitance-type pressure sensor capable of reducing a variation in reference capacitance. The capacitance-type pressure sensor includes insulating spacer (3b) arranged between a main capacitive electrode (4) and a reference capacitive electrode (5) to couple a base substrate (1) and a diaphragm substrate (2) to each other. The insulating spacer (3b) is patterned so as to restrain a variation in distance between the reference capacitive electrode (5) and a counter electrode (10) arranged on the diaphragm substrate (2). Such construction reduces a variation in capacitance between the reference capacitive electrode (5) and the diaphragm electrode (10), to thereby increase accuracy at which a pressure is measured.
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