Pressure sensor with housing, sensor element having ceramic components, and support ring mounting sensor element to housing
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United States of America Patent
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-
Sep 26, 2000
Grant Date -
N/A
app pub date -
Apr 8, 1997
filing date -
Apr 14, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A capacitive pressure sensor for measurement of the pressure of a fluid comprises a sensor element (1) which is made of a ceramic, in particular glass ceramic, material and in the conventional way has interior capacitor plates. The sensor element (1) is plate-shaped and joined to a surrounding support ring (5'). The support ring (5') is made of metal and is connected to the sensor elemnt (1) by means of a joint (3') made of ceramics, in particular glass ceramics, at an annular region around an edge line of the sensor element (1). The support ring (5') can have a shoulder formed by a protrusion (15) in the interior surface thereof, against which shoulder then a region of the sensor element (1) rests and at which the joint (3') is made.
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