Offset rotor flat media processor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 3, 2000
Grant Date -
N/A
app pub date -
Jun 30, 1998
filing date -
Jun 30, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A centrifugal processor for flat media, such as a silicon wafer, has a rotor eccentrically positioned within a cylindrical chamber or bowl. Drainage openings or slots are located near the bottom of the bowl. The rotor is offset in a direction away from the drain openings. Fluids drain more quickly from the bowl, as the tendency of the spinning rotor to draw fluids up and around the bowl is reduced, due to the rotor offset and to the discrete drain openings, and the position and orientation of the drain openings.
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