Importance

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Abstract

A micro-electromechanical device, such as a micro-sensor or micromachine, includes a movable part in the form of a cantilever or diaphragm, which is formed on a substrate. In order to recover stiction in which the movable part is fixedly adhered to the substrate, a heating element is provided on a surface of the substrate which is opposed to the movable part. The heating element can be operated upon occurrence of stiction, so as to generate heat and thereby separate the movable part from the substrate and assure a proper operation of the device. The device can be produced at a relatively low cost, and achieves a stiction recovery with a high reliability, even when the device is enclosed in a package.

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First Claim