Multilayer micro-gas rheostat with electrical-heater control of gas flow
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United States of America Patent
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Oct 31, 2000
Issued Date -
N/A
app pub date -
Jun 6, 1997
filing date -
Jun 9, 1995
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Abstract
A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon body and a sealing glass layer bonded thereto. Flow is controlled through the flow path(s) by heating the body to decrease the gas flow.
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