Substrate transferring apparatus and substrate processing apparatus using the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 14, 2000
Grant Date -
N/A
app pub date -
Jul 1, 1998
filing date -
Jul 4, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members each have a pair of outer support segments for supporting an outer periphery of the substrate and a pair of inner support segment provided between the outer support segments.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully